An Integrated MEMS Gyroscope Array with Higher Accuracy Output.docVIP

Sensors 2008, 8, 2886-2899 sensors ISSN 1424-8220 ? 2008 by MDPI /sensors Full Research Paper An Integrated MEMS Gyroscope Array with Higher Accuracy Output Honglong Chang *, Liang Xue, Wei Qin, Guangmin Yuan and Weizheng Yuan Micro and Nano Electro Mechanical System Laboratory, Northwestern Polytechnical University, Xi’an City, Shaanxi Province, P. R. China, 710072 * Author to whom correspondence should be addressed. E-mail: changhl@ Received: 29 October 2007 / Accepted: 21 April 2008 / Published: 28 April 2008 Abstract: In this paper, an integrated MEMS gyroscope array method co