Ceramic MEMS Designed for Wireless Pressure Monitoring in the Industrial Environment.docVIP

Sensors 2012, 12, 320-333; doi:10.3390/s120100320 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Ceramic MEMS Designed for Wireless Pressure Monitoring in the Industrial Environment Marko Pavlin 1,*, Darko Belavic 2 and Franc Novak 2 1 In.Medica d.o.o., Levicnikova 34, 8310 Sentjernej, Slovenia 2 Jozef Stefan Institute, Jamova 39, 1000 Ljubljana, Slovenia; E-Mails: darko.belavic@ijs.si (D.B.); franc.novak@ijs.si (F.N.) * Author to whom correspondence should be addressed; E-Mail: marko.pavlin@inmedica.si; Tel.: +386-7-3934-959; Fax: +386-7-3934-849. Received: 24 November 201