CMOS-MEMS Test-Key for Extracting Wafer-Level Mechanical Properties.docVIP

Sensors 2012, 12, 17094-17111; doi:10.3390/s121217094 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article CMOS-MEMS Test-Key for Extracting Wafer-Level Mechanical Properties Wan-Chun Chuang 1,*, Yuh-Chung Hu 2 and Pei-Zen Chang 3 1 Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-sen University, Kaohsiung 80424, Taiwan 2 Department of Mechanical and Electro-Mechanical Engineering, Center of Green Technology, National ILan University, ILan 260, Taiwan; E-Mail: ychu@.tw 3 Institute of Applied Mechanics, National Taiwan University, Taipei 10617, Taiwan