Comparisons between Membrane, Bridge and Cantilever Miniaturized Resistive Vacuum Gauges.docVIP

Sensors 2012, 12, 8770-8781; doi:10.3390/s120708770 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Comparisons between Membrane, Bridge and Cantilever Miniaturized Resistive Vacuum Gauges Kasun Gardiye Punchihewa, Evan Zaker, Rade Kuljic, Koushik Banerjee, Tatjana Dankovic, Alan Feinerman and Heinz Busta * Department of Electrical and Computer Engineering, University of Illinois at Chicago, Chicago, IL 60607, USA; E-Mails: kpunch2@ (K.G.P.); ezaker2@ (E.Z.); rkulji2@ (R.K.); kbaner2@ (K.B.); tdanko2@ (T.D.); feinerman@ (A.F.) * Author to whom correspondence should be addresse