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Differential Laser Doppler based Non-Contact Sensor for Dimensional Inspection with Error Propagation Evaluation.doc

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Differential Laser Doppler based Non-Contact Sensor for Dimensional Inspection with Error Propagation Evaluation

Sensors 2006, 6, 546-556 sensors ISSN 1424-8220 ? 2006 by MDPI /sensors Special Issue “Intelligent Sensors” Edited by Wilmar Hernandez Full Research Paper Differential Laser Doppler based Non-Contact Sensor for Dimensional Inspection with Error Propagation Evaluation Samir Mekid * and Ketsaya Vacharanukul The University of Manchester, School of Mechanical, Aerospace and Civil Engineering. PO Box 88, Manchester, UK * Author to whom correspondence should be addressed. E-mail: S.Mekid@manchester.ac.uk Received: 25 April 2006 / Accepted: 13 June 2006 / Published: 15 June 2006 Abstract: To achieve dynamic error compensation in CNC machine tools, a non-contact laser probe capable of dimensional measurement of a workpiece while it is being machined has been developed and presented in this paper. The measurements are automatically fed back to the machine controller for intelligent error compensations. Based on a well resolved laser Doppler technique and real time data acquisition, the probe delivers a very promising dimensional accuracy at few microns over a range of 100 mm. The developed optical measuring apparatus employs a differential laser Doppler arrangement allowing acquisition of information from the workpiece surface. In addition, the measurements are traceable to standards of frequency allowing higher precision. Keywords: In-process inspection, Differential Laser Doppler, Error propagation. 1 Introduction Zero defect parts could only be obtained via full automatic error compensation while they are being machined on the next generation of intelligent machining processes to ensure high quality products at low price and short time. Off-line axis error compensation is successfully achieved with NC machines including thermal growths while on-line compensation still has some difficulties mainly with probes hardware and controllers [1-2]. Quality control of the manufactured parts is traditionally performed using ma