一种利用激光干涉非接触式测量玻璃厚度 的新方法.pdfVIP

Applied Physics 应用物理, 2017, 7(1), 6-13 Published Online January 2017 in Hans. /journal/app /10.12677/app.2017.71002 A New Non-Contact Method for Measuring Glass Thickness with Laser Interference Dongjie Tan, Guoye Guan, Fang Lin* College of Physical Science and Technology, Sichuan University, Chengdu Sichuan st th th Received: Jan. 1 , 2017; accepted: Jan. 14 , 2017; published: Jan. 18 , 2017 Copyright © 2017 by authors and Hans Publishers Inc. This work is licensed under the Creative Commons Attribution International License (CC BY). /licenses/by/4.0/ Open Access Abstract A new non-contact method with laser and computer employed has been proposed in this paper, which could be applied to measure thickness of transparent objects, such as glass. The method, which had lower requirement for components and manual operations, was based on Michelson interferometer and would not cause damage to test samples. Under the conditions of college- physics laboratories, its precision could reach 0.1 mm. In addition, a new set of integrated design scheme, which might help improve equipment portability, measurement convenience and preci- sion, was put forward. Keywords Non-Contact Measurement, Michelson Interferometer, Glass Thickness, Laser Interference 一种利用激光干涉非接触式测量玻璃厚度 的新方法 谭东杰，关国业，林 方* 四川大学物理科学与技术学院，四川 成都 收稿日期：2017年1月1 日；录用日期：2017年1月14 日；发布日期：2017年1月18 日 *通讯作者。 文章引用: 谭东杰, 关国业, 林方. 一种利用激光干涉非接触式测量玻璃厚度的新方法[J]. 应用物理, 2017, 7(1): 6-13. /10.12677/app.2017.71002 谭东杰 等 摘 要 本文提出一种结合激光与计算机实现非接触式测量玻璃等透明物体厚度的新方法。该