张大勇 纳米级FePtFe多层膜中微结构的优化与耦合效应.pdf

第 卷 第 期 真 空 科 学 与 技 术 学 报 25 3 年 、月 （ ） 2005 5 6 JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY CHINA 181 纳米级FePt/ Fe 多层膜中微结构的优化与耦合效应 张大勇 顾有松 展晓元 纪 箴 张 跃* （北京科技大学材料物理与化学系 北京 100083） Microstructures and Coupling of Nano FePt/ Fe Multilayers * ， ， ， Zhang Dayong Gu Yousong Zhan Xiaoyuan Ji Zhen and Zhang Yue （ ， ， ， ， ） Dep artment of Material Physics and Chemistry Beij ing University of Science and Technology Beij ing 100083 China Abstract FePt/ Fe mutlilayers with varying Fe layer thickness were grown on Si substrates by magnetron sputtering and in-situ annealing （ ）， at different temperatures . Its microstructures and its magnetic properties were studied with X-ray diffraction XRD scanning electron mi- croscopy（ ） （ ） SEM and magnetic gauge . The results show that well-ordered hard magnetic FePt phase with a face-centered-tetragonal f ct crystal structure exists and the multi-layer is a good exchange-spring type permanent magnet . Influence of various growth factors on its microstructures ， ， （） and its magnetic properties including Fe layer thickness and annealing temperatures was discussed . Possible mechanism s responsible for the exchange coupling failure was tentatively explained . ， ， Key