硅纳米线的合成.ppt

Current Research Control the growth of small diameter Silicon Nanowires Research in thermoelectric performance Application of Silicon Nanowires in FET，Sensors and other electronic devices Synthesis of Silicon Nanowires Group members 陈明霞 崔言明 靳 俊 朱 颜 李子卉 Reporter Group No. 1 Dec.23 2008 Outline Introduction Synthesis Methods and Mechanisms Silicon Nanowires Applications Current Research Introduction “For applications in nanoscale technology, the reproducibility is essential, heterogeneity promises greater control of nucleation, and the absence of strong size effects simplifies process design.” B. J. Kim et al. Science 322, 1070 (2008) Synthesis methods Bottom-Up Top-Down ? Laser ablation ? Chemical vapor deposition ? Thermal evaporation ? Hydrothermal ? Organic solution ? Template method ? Electron beam lithography ? Photoetch method ? Electrochemical method Laser Ablation Yang YH et al. J. Phys. Chem. B, 2004, 108 (3), 846-852 Morales A M et al . Science , 1998 , 279: 208-211 Chemical Vapor Deposition Bogart TE et al. Adv Mater, 2005, 17 (1): 114-117 Bogart TE et al. Adv Mater, 2005, 17 (1): 114-117 Thermal Evaporation J. Phys. Chem. B 2001, 105 (13), 2507-2514 dark gray aligned round-tip rods; (b) octopuslike; (c) pinlike; (d) wirelike Organic Solution Nano Letters 2005, 5(4): 681-684 Nano Letters 2005, 5(4): 681-684 Electrochemical method Peng KQ, et al. Adv. Funct. Mater. 2006, 16: 387-394 Ag/Si/HF/Fe(NO3)3 System Mechanism (Ⅰ) Adv Mater. 2003, 15 (7-8):?635-640 ? Oxide-assisted Growth (OAG) Vapor-Liquid-Solid (VLS) Mechanism (Ⅱ) Solid-Liquid-Solid (SLS) Yan HF et al. Chemical Physics Letters 323(2000)224–228 Mechanism (Ⅲ) Supercritical Fluid-Solid-Solid (SFSS) Nano Letters 2005, 5(4): 681-684 High-performance lithium battery anodes Chan CK et al. Nature Nanotechnology, 2008, 3 (1): 31-35 Applications Tian BZ et al. Nature, 2007, 449(7164): 885-889 Coaxial silicon nanowires as solar cells Nanowire Nanosensors for Highly Se