基于静电排斥力的大冲程MEMS变形镜.pdfVIP

海MEMS岛传感器 基于静电排斥力的大冲程MEMS 变形镜 陈科中凡1 ，姚 军1 ，高棉华2 ，江为氏1 ，倪祖高1 (1.中国科学院尤电技术研究所徽细加工与光学技术国掌重点实验室，成都 610209; 2. 四川大学物辍学院，成都 610064) 摘要z 设计并制造了一种基于静电排斥为的大冲程 MEMS 变形镜，此变形镜采用了三个多晶硅 结构层和一个金属反射层的设计。利用农面破..I.艺完成了变形镜的加工，结合有限元，分析软件和 白丸子涉仪对三种不同驱动器电极空间分布方式的静电排斥型变形镜进行了分析和研究。测试结 果表明，静电排斥型变形镜在 200 V 下能实现1. 7μm 以上的位移，冲程较传统静电吸引型变形 镜有.K著提高。在相同电压下，第二才是多晶硅作为边缘也极时的变形镜获得的位移最大，在 210 V下达到 2.42μm. 关键询:微电子机械革统 (MEMS); 变形镜;自适应光学z 吸合效应;静电排斥力;冲程 中团分提号:丁H703 文献栋识码:A 文章截编号: 1671-4776 (2011) 04-0242-06 Large皿Stroke MEMS Deformable Mirrors Based 00 Electrostatic-Repulsive-Force Chen Kefan 1 , Yao Jun 1 , Gao Fuhua2 , Wang Weimin , Ni Zugao (1. State Key Laboratory 0/ Optical Technologies /or Micro/abrication. Institute 0/ 0ρtics and Electronics. Chinese Academy 0/ Sciences , Chengdu 610209. Chinal 2. Ðepartment 0/ Physics. Sichuan University , Chengdu 610064 , China) Abstract: A large- stroke electrostatic幡repulsiveωforce MEMS deformable mirror was designed and fabricated. This deformable mirror was prepared using a surface-micromachining polysilicon process , and consisted of three polysìlìcon structural layers and a metal reflectÌve layer. Three types of the mirrors with different actuator electrodes arrangements were investigated by finite element analysis , and measured with a scanning white light interferometer. The results show that the displacement of the electrostatic-repulsive-force deformable mirrors ìs more than 1. 7μm at 200 V , and the stroke of which is larger than that of conventional electrostatic-attractive-force deformable mirrors. Additional忡， the deformable mirr