材料表面工程-CH-7-奈米结构薄膜.pdf

薄膜製程與實務 奈米結構薄膜 奈米結構薄膜 Nanocrystalline materials and coatings 張銀祐 2006/12 S.C. Tjong, Haydn Chen, Materials Science and Engineering R 45 (2004) 1–8 2 3 奈米科技 奈米科技 Stadium Corral and atoms Media : Iron on Copper (111) 4 碳原子所建構的家族 5 奈米結構材料之特性 As the size reduces into the nanometer range, the materials exhibit particular and interesting mechanical and physical properties, e.g. increased mechanical strength, enhanced diffusivity, higher specific heat and electrical resistivity compared to conventional coarse grained counterparts. 6 奈米結構材料之機械性質 The hardness and yield strength tend to increase with decreasing grain size down to a critical value (ca. 20 nm). When the grain size is below 20 nm, strength appears to decrease with further grain refinement. At this stage, dislocation sources inside the grains can hardly exists. This implies that dislocation pile-ups cannot form and the Hall–Petch relationship for conventional coarsergrained materials is no longer valid. Instead, inverse Hall–Petch effect, i.e. softening is obtained when the grain size is reduced. 7 奈米複合材料之機械性質 nanocomposite coatings with superhardness 40 GPa can be prepared by dispersing the transition metal nitride nanoparticles in an amorphous covalent nitride matrix (1 n