溶胶_凝胶法在聚酰亚胺表面沉积氧化铝薄膜及性能_张明玉_刘立柱_翁凌_周浩然_万.pdf

34 12 Vol.34 No.12 Apr.25, 2014 2014 4 25 Proceedings of the CSEE ©2014 Chin.Soc.for Elec.Eng. 1965 DOI 10.13334/j.0258-8013.pcsee.2014.12.017 0258-8013 (2014) 12-1965-07 TM 215 TM 85 – 1 1 1 1 2 (1 150040 2 412100) Fabrication and Properties of Polyimide Film with Aluminum Oxide Thin Films via Sol-Gel Method 1 1 1 1 2 ZHANG Mingyu , LIU Lizhu , WENG Ling , ZHOU Haoran , WAN Sheng (1. College of materials science and engineering, Harbin University of Science and Technology, Harbin 150040, Heilongjiang Province, China; 2. Zhuzhou Times New Material Technology Co.,Ltd, Zhuzhou 412000, Hunan Province, China) ABSTRACT: Aluminum oxide(Al O ) thin films on polyimide SEM)(atomic force microscopyAFM)X 2 3 (PI) substrate were prepared via sol-gel method based on (X-ray diffractionsXRD) surface modification and ion exchange technique. The Al2O3 PI () composite films with Al O layers were characterized by 2 3 (thermogravimentric analysesTGA) scanning electron microscopy (SEM), atomic force microscopy Al2O3 PI (AFM), X-ray diffractions (XRD) and Thermogravimentric Al O PI 2 3 analyses (TGA), respectively. The breakdown field strength Al O 1 m Al O 2 3 2 3 and corona-resistant time of compos