CMOS电容式湿度传感器特性研究-电子器件.PDF

第34 卷 第4 期 电 子 器 件 Vol.34摇 No.4 2011年8 月 ChineseJournal of Electron Devices Aug. 2011 A Study on the Performance of a CMOS Capacitive Humidity Sensor* LIU Yan,ZHAO Chenglong,NIE Meng,QIN Ming* (Key Laboratory of MEMS of theMinistry of Education,Southeast University,Nanjing 210096,China) Abstract:A study ontheperformance of a CMOS capacitivehumidity sensor ispresented.Thishumidity sensorwas fabricatedwith the standard CMOS technology and the MEMS post鄄pro