第五章长度及线位移的测量.ppt

(a) (b) (c) (d) STM image：(a) 吸附于石墨表面的C32H66有机分子，scan range10nm×10nm； (b) 蛋白质分子的双链结构；(c) Si(111)面原子重构像；(d) 血细胞。 STM操纵氙原子拼出的IBM三个字母 Atomic?manipulation using STM Basic structure of AFM Deformation detection of probe Probe with cantilever?beam optical lever Tip Working principle of optical lever 光杠杆末端位移和理想放大倍数？ What is SPM？ What can SPM do？ Scanning Probe Microscopy – Merits Ultra-high resolution (Z~0.1nm X/Y~1nm) Ability of modifying samples (manipulation, fabrication, lithography) Ability of measuring multiple properties (mechanical, electrical, chemical …) Applicable to all kinds of material (metal, semiconductor, nonconductor, bio-) No requirement of vacuum Advantage Small scan size (Z~10μm, X/Y~100μm) Fake image (tip-sample convolution, tip contamination) Low efficiency (5~10min to obtain a image) Disadvantage Scanning Probe Microscopy – Applications Atomic resolution Blood Cell Conductance detection In-situ multiple properties measurement Mechanical property testing Nano-lithography Nano-manipulation 3D-AFM 3D-AFM * Chapter Five Length Linear displacement measurement 5.1 Overview 5.2 Measurement of Length 5.3 Measurement of Form-Position Error and Abnormity Surface 5.4 Measurement of Surface roughness 5.5 Measurement of linear displacement 5.6 Nano-measurement technique Line displacement is the variable quantity of position of particle in the direction of line. The measuring range of large displacement is from several meters to thousands of meters. At present, the most effective measurement method is laser measurement. Laser measurement Coherent measurement Incoherent measurement Measurement of large displacement The level is the generic term of liquid level, material level and interface level. Electro-mechanical measurement The floater is replaced by detecting plate. The plate is flat cylindrical and its density is bigger than the liquid. The plate is adjusted to balance accurately with a half into liquid b