基于虚拟仪器的薄膜电阻率测量系统设计_潘海彬.pdfVIP

do:i10.3969 /.jissn.1671-7775.2010.04.016 1, 2 2, 3 1 1 1 潘海彬 , 丁建宁 , 李伯全, 罗开玉, 王小飞 (1., 2 120 13;2. , 2 120 13;3. , 2 13 164) :基于虚拟仪器技术及 Rymaszewski四探针双电测组 法设计了薄膜电阻率自动化测量系统. 在虚拟仪器软件 LabVIEW和数字量输出模块 NI940 1的控制下, 利用基于 CD4052 芯片的接口电 路实现电流探针 电压探针的自动切换, 并通过 LabVIEW程序控制 Keithley2400 数字源表实现两 次电压测量;同时根据两次电压测量结果由 LabVIEW程序完成范德堡修正因子和方块电阻的计 算;最终实现薄膜电阻率自动测量 记录和显示.试验结果表明,所设计的自动测量系统不仅可以满 足多种薄膜电阻率测量要求, 而且提高了测量精度和自动化程度, 同时精简了薄膜电阻率测量 过程. :虚拟仪器;方块电阻;薄膜电阻率;四探针双电测组 法;范德堡修正因子 :TP216　　:A　　:167 1-7775 (2010 )04 -0447 -05 Designofthinfilmresistivitymeasurementsystembasedon virtualinstrumentationtechnology 1, 2 2, 3 1 1 1 PanHaibin, DingJianning, LiBoquan, LuoKaiyu, WangXiaofei (1.SchoolofMechanicalEngineering, JiangsuUniversit,yZhenjian,gJiangsu2 120 13, China;2.CenterofMicro-NanoScienceandTech- nology, JiangsuUniversity, Zhenjian,gJiangsu2 120 13, Chin;a3.CenterofLow-dmiensionalMaterial,sMicro-NanoDevicesandSystem, JiangsuPolytechnicUniversity, Changzhou, Jiangsu2 13 164, China) Abstrac:tThinfilmresistivitymeasurementsystemwasdesignedbasedonthevirtualinstrumentation technologyandRymaszewskidualelectro-measurementwithfour-pointprobe.sInterfacecircuitbasedon CD4052 chipwasdesignedtorealizeautomaticswitchingofcurrentprobesandvoltageprobesunderthe controlofvirtualinstrumentationsoftwar,eLabVIEW anddigitaloutputmodulehardwar,eNI9401. Keithley2400 sourcemeterundercontrolofLabVIEW programwasusedfortwotmiesvoltagemeasure- men,tandthenvanderPauwcorrectionfactorandsheetresistancewerecalculatedbyLabVIEW program basedonresultsofvoltagemeasuremen.tFinally, thinfilmresistivitywasautomaticallymeasured, recor- dedanddisplayed.Theresultsofexpermientsshowthattheproposedsystemcanmeettheneedsofthin