声表面波质量传感器的P矩阵模型与实验分析_杨莺.pdfVIP

4 1 6 浙 江 大 学 学 报( ) V ol 4 1 N o 6 2007 6 J ournal o f Zhej iang U niv ersity ( Engineer ing Science) J un 2007 P 杨 莺, 朱大中 ( , 310027) : Y ( SA W) P , 3 , , , 15 dB , Q 4 800 8 6 89 , - 1 81 dBc/ H z ; 2 dB , Q 8 689 12 477 , - 1 20 dBc/ Hz , Q , : Q ; ; ; P ; : T P212; T N 65 : A : 1008- 97 3X( 2007) 0 6- 0 881- 05 P-matrix model and experimental analysis of surface acoustic wave mass sensor Y A N G Y ing , ZH U Da- zh ong (Dep artment of Inf ormation Science and E lectronic Eng ineering , Zhej iang University , H angzhou 3 10027, hina) Abstract: T he frequ ency domain prop ert ies of Y t y pe du al pat h surf ace acou st ic w ave ( SA W) mass sensors w it h new st ru ctures w ere invest igat ed exp er im ent ally and t heoret ically u sing P- m at rix calculat ion model T he p erf orm ance of t hr ee devices w ith diff er ent st ru ct ures w as com pared By u sing apo dized int er digit al tr an sdu cer ( IDT ) comp ared w ith unif orm ed IDT , t he t riple t ran sverse int erf erence ( T T I) and mult iple re- f lect ion s w ere decreased, t he side l obe reject ion w as increased by 15 dB, the equivalent Q valu e w as im- prov ed f rom 4 800 t o 8 689 in oscillat ion mode, and t he sho rt term fr equ ency st abilit y w as incr eased by - 1 81 dBc/ H z By u sing slant ing ref lect or, the b andpas s ripple du e t o edge reflect ion w as reduced by 2 dB, t he equ iv alent Q v al ue w as improv ed fr om 8 689 t o 12 477 in o scillat ion mode, and t he short t er m f re- quency st abilit y w as increased by - 1 20 dBc/ H z T herefo re, hig her equivalen