扫描电镜背散射衍射装置及数据处理系统.pdfVIP

扫描电镜背散射衍射装置及数据处理系统 1 1 1 1 1 2 孙丽虹 刘安生 邵贝羚 胡广勇 张希顺 吴志斌 1 2 ( 北京有色金属研究总院 北京 100088) ( 北京华联数 系统有限公司 北京 100081) 电子背散射衍射装置是获取材料的亚微米的范畴晶体学信息扫描电镜附件, 此装置可在观察材料的形 貌及分析成分的同时研究材料的取向关系本文介绍了电子背散射衍射接收系统, 该系统的 CCD 以快速方式接收的 灵敏度为5mlux , 积累方式接收的灵敏度为10lux , 分辨率为512dpi, 扫描卡最高的分辨率为4096X4096并成功地安 装在北京有色金属研究总院JSM840 扫描电镜上此系统设计合理结构简单操作方便安全同时根 Hough 变 换的原理, 编写了识别电子背散射衍射花样的软件, 实现了全自动实时识别此花样, 给出相应的数 电子背散射衍射; 数字图象; Hough 变换; 扫描电镜 T N16 Development of an Electron Backscattering Dif fraction and Data Processing System for SEM 1 1 1 1 1 2 Su Liho g, Liu A she g, Shao Beili g, Hu Gua gyo g, Zha g Xishu , Wu Zhibi 1 ( Ge eral Research I stitute for No ferrous Metals, Baiji g 100088, P. R. Chi a) 2 ( Hua Lia Data System Co. Ltd, Beiji g 100081, P. R. Chi a) Abstract This paper describes a electro ic back scafferi g diffractio system, which has bee successfully developed for JSM- 840 SEM i GRINM. The CCD se sitivity of the system is 5 millilux for the mode of live video rate, 10 microlux for the ormal i tegratemode, a d the resolutio of the CCD is 512 dpi. The highest reso lutio of sca i g card is 4096X4096. The desig of the system is reaso able, a d the co structio is compact. The system is easy to operate, w ith safety a d reliability. The ba ds of diffractio patter ca be automatically ide tified by usi g our software. Key words Electro Backscatter; diffractio ; digital image;Hough tra sform; SEM. 1 前言 X-