脉冲激光沉积法制备纳米功能薄膜的形膜条件及其性能研究.pdf

欧阳钢 脉冲撤光沉积法制备纳米薄膜的形膜条件及其性能研究 了一些重要的实验数据和初步的理论依据，对该薄膜材料作为功能 材料的应用范围，并早日进入实用化阶段有一定的意义。 关键词。脉冲激光沉积技术 纳米金刚石薄膜 类金刚石薄膜 性能 欧阳钢 脉冲激光沉积法制备纳米薄膜的形膜条件及其性能研究 iii Abstract thin thin anddiamond—likefilms diamondfilms Nanocrystalline been laser technical．Inthis have bypulseddepositing paper, prepared theeffectofsubstrate we studied temperature，laserenergy primarily thin the and onthe ofthe films，and gaspressure growth growth havealsobeen of diamondfilms mechanisms nanoerystalline analyzed US．Thesecondharmonic a Nd：YAGlaser byQ-switched by produced of 1or witll 532 5Hz, wavelength and lOOmJ～200mJwidthT=10 singlepowerperpulse pulse films used．ninwero on and nanoseconds(ns)Was depositedsapphire is siliconsubstrate．皿eresultsshownthat single-crystalline the which at550。Candunder 4～6Pa sampledeposited oxygenpr