用循环伏安法与交流阻抗法表征Au环微电极.pdfVIP

第4卷 第8期 2009 年 8 月 中国科技论文在线 Sciencepaper Online 587 用循环伏安法和交流阻抗法表征 Au 环微电极 景蔚萱，蒋庄德，朱明智 （西安交通大学机械制造系统工程国家重点实验室，西安710049） 摘 要：介绍了Au环微电极的制备和表征方法，该Au环微电极有望在电化学、生物MEMS等方面得到应用。首先设 计专用夹具，并在直径为 125 µm的光纤基底上用电子束蒸发系统沉积厚度为300 nm 的Au膜；然后在所沉积的Au膜上 用真空沉积系统淀积 700 nm厚的Parylene钝化层；最后切断沉积有多层薄膜的光纤并形成Au环电极。用扫描电镜(SEM) 表征所沉积薄膜及其界面处的结合质量；在室温下用电化学工作站在可逆系统中对Au环电极进行循环伏安和交流阻抗 谱分析。表征结果表明：所制备的薄膜及其界面处的结合质量良好；循环伏安响应曲线为典型的S形；交流阻抗谱和 Randels等效电路一致；所制备的Au环电极具备微电极特性。 关键词：电子束沉积系统；真空蒸镀系统；扫描电子显微镜；循环伏安法；交流阻抗谱 中图分类号：TN305 文献标识码：A 文章编号：1673－7180(2009)08 －0587 －5 Characterization of Au ring-microelectrode with cyclic voltammetry and AC impedance spectroscopy Jing Weixuan ，Jiang Zhuangde ，Zhu Mingzhi (State Key Laboratory for Manufacturing Systems Engineering ，Xi’an Jiaotong University, Xi’an 710049, China) Abstract: In this paper fabrication and characterization of Au ring-microelectrodes are presented. With optical fibers of 125 μm diameter as substrates and employment of a dedicated fixture, 300 nm Au ring microelectrodes were fabricated by an electron beam evaporation system and a vacuum parylene deposition system. With scanning electron microscopy (SEM) the quality of the deposited films and the adhesion at the interfaces were characterized. With CH1600 electrochemical workstation electrochemical characterizations were performed at room temperature in a conventional three-electrode electrochemical cell. Regarding to cyclic voltammetry experiments, the cyclic voltammograms exhibited the sigmoidal response of typical microelectrodes. As for the AC impedance frequency spectrum, good agreement was found with the Randels-type equivalent circuit, confirming the potential applic