激光差动共焦透镜厚度测量方法.docVIP

  Laser differential confocal lens thickness measurement# Wang Yun, Qiu Lirong, Shi Libo, Zhao Weiqian** (Key Laboratory of Photoelectronic Imaging Technology and System (Ministry of Education of 5 10 15 20 25 30 35 40 China), Opto-Electronic College, Beijing Institute of Technology, Beijing 100081) Abstract: A new laser differential confocal lens thickness measurement is proposed to achieve the high-precision non-contact measurement of lens thickness，which uses the property that the absolute zero of an axial intensity curve exactly corresponds to the focus of the objective in a differential confocal system (DCS). The proposed approach uses the absolute zero of DCS axial response curve to precisely identify the vertexes of the test lens, obtains the central optical thickness of the test lens, and then uses the radius of curvature and refractive index of the test lens and ray tracing facet iterative calculation to obtain the geometrical central thickness of the test lens. The theoretical analyses and preliminary experiments indicate that the measurement accuracy is better than 0.03%. Keywords: confocal; differential; lens thickness; measurement 0 Introduction Spherical lenses are the basic component in an optical system, and the thickness t, one of their important parameters, combining with refractive index n and radius of curvature (ROC) r can determine their performance parameters, such as the focal length, location of principal plane and aberrations, so the lens thickness needs to be measured accurately and corrected iteratively in the fabrication of lens. Therefore, it is significant to develop a simple and precise approach for the lens thickness measurement. Many methods are used for the thickness measurement of the optical components. In general, most of the thickness measurement methods for the optical components such as the interferometry[1-3], ellipsometry[4-6] and attenuated total reflection method (ATR) [7], and so on, are mainly used for the thicknes