静电驱动压电检测微机械陀螺仪的力学分析 - researchgate.pdfVIP

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静电驱动压电检测微机械陀螺仪的力学分析 - researchgate.pdf

静电驱动压电检测微机械陀螺仪的力学分析 - researchgate

See discussions, stats, and author profiles for this publication at: /publication/314232054 Mechanics of MEMS Gyro with electrostatic driving and capacitive read-out () Conference Paper · ugust 2009 CIT TIONS RE DS 0 3 2 authors, including: Bohua Sun Cape Peninsula University of Technology 120 PUBLIC TIONS 192 CIT TIONS SEE PROFILE Some of the authors of this publication are also working on these related projects

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