电场增强金属Al与Ni诱导非晶硅横向结晶.pdfVIP

第 28 卷 　第 4 期 真 　空 　科 　学 　与 　技 　术 　学 　报 　　　　　　　 　　　　　　　　　　　 2008 年 7 、8 月 CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY 325 综述评论 电场增强金属Al 和Ni 诱导非晶硅横向结晶 王光伟 　张建民 (天津工程师范大学电子工程系 　天津 　300222) Electric FieldAided MetalInduced Lateral Crystallization of Amorphous Silicon Wang Guangwei ,Zhang Jianmin ( ) Department of Electronic Engineering , Tianjin University of Technology and Education , Tianjin 300222 , China 　　 ( ) Abstract 　The amorphous silicon was crystallized by electric field aided ,metal Al ,Ni induced lateral crystalliza ( ) ( ) tion MILC . The microstructures of the crystallized amorphous silicon were characterized with Xray diffraction XRD and Raman spectroscopy. The influence of various factors ,including electric field strength and distribution ,metal specie ,and annealing conditions ,on crystallization of amorphous silicon was studied. Discussions focused on many advantages of MILC ( ) over other crystallization techniques and on its possible applications in fabrication of thin film transistors TFT . Th