利用afm 动态电场在si 表面实现纳米氧化结构 - 中北大学微米纳米 .pdfVIP

_______________________________________________________________________________ AFM Si 300072 AFM Si PACC: 0779; 8160; 6048G TN16 AFM SPM SPM [1] Digital Instrument AFM Nanoscope a SPM 1 NT-MDT SC12/W2C 30 nm MITI AFM Matsumoto Nb [2] Snow AFM Ti AWG2021 [3] MOS AFM [2,3,4] AFM AFM Fig.1 Schematic diagram of the AFM field-induced fabrication system 99022 1 1974 . 1952 . _______________________________________________________________________________中国科技论文在线 3.1 2 N Si100 33 1 V 3 V 11 V20 ms 2 2 Si Fig. 2 Oxidation dots fabricated with voltage pulse on Si surface Si(1)