硅片缺陷测试教材.pdfVIP

Inline PhotoLuminescence High Quality High Speed Inline Imaging Lifetime Calibrated PL Applications • Inline photoluminescence measurement at any processing stage from as cut wafers to finished cells. • Megapixel images of full 125 or 156 mm wafers. • High resolution image enable defects detection around grain boundaries and of dislocations. • Sensitivity of low lifetime a