一种三明治结构透明导电薄膜的制备及光电性能.pdf

第 39 卷第 2 期 应 用 科 技 Vol.39, No.2 2012 年 4 月 Applied Science and Technology Apr. 2012 oi:10.3969/j.issn.1009-671X. 201106012 一种三明治结构透明导电薄膜的制备及光电性能 周继承，杨延林 中南大学 物理科学与技术学院，湖南 长沙 410083 摘 要：采用直流磁控溅射法制备了 ZAO/Cu/ZAO 多层透明导电薄膜，研究了参铝氧化锌(ZAO)薄膜厚度对多层膜 晶体结构和光电特性的影响. 用 X 射线衍射仪、原子力显微镜、紫外−可见光分光光度计及四探针对样品的晶体结构 与光电性能等进行了表征. 结果表明，多层膜的平均透过率最高达 86% ，方块电阻达 9 Ω/ sq ；ZAO 膜层厚度对多层 膜的导电性能影响很小，但严重影响可见光透过率；多层膜中的 ZAO 层仍呈 ZnO 晶态结构，且具有明显的 c 轴取 向特征. 这种三明治结构是一种性能优良的太阳能透明导电层候选材料. 关键词：磁控溅射；透明导电薄膜；ZAO/Cu/ZAO 多层膜；光电特性 中图分类号：O484.4 文献标志码：A 文章编号：1009-671X （2012 ）02-0080-05 Preparation and photoelectrical properties of a kind of transparent conductive multi-layer film ZHOU Jicheng ，YANG Yanlin School of Physics Science and Technology, Central South University, Changsha 410083, China Abstract ：ZAO/Cu/ZAO multi-layer transparent conductive film was prepared by direct current (DC) magnetron sputtering method. The effects of Al-doped ZnO (ZAO) layer thickness on the crystal structures and photoelectrical properties of multi-layers were studied by XRD, atomic force microscope, UV-Vis spectrophoto meter and four-point probe method, respectively. The experimental results show that the maximum average transmittance of multi-layers is 86%, a sheet resistance is 10 Ω/sq. The sheet resistance changes slightly while the visible light transmittance changes obviously with the variation of ZAO layer thickness. The ZAO layer of the multi-layers still presents a ZnO crystalline state, with an obvious c-axis orientation trend. This kind of sandwich multi-layer is proposed as a candidate with excellent prope