基于ITO玻璃-PDMS复合式低电压电泳芯片的快速制备 - 湖北民族学院.PDF

27 3 () Vo.l27　No.3 2009 9 JournalofHubeiUniversityforNationalities(NaturalScienceEdition) Sep.2009 ITO-PDMS , 　, , 　 (湖北民族学院信息工程学院, 湖北恩施 44 5000 ) :提出了一种基于 ITO玻璃-PDMS复合式低电压电泳芯片的 速制备新方法.该方法采用 Protel软件绘 制低电压电泳芯片沟道的形状, 利用电路板加工技术加工沟道模具, 并采用 PDMS整体浇注方法制备芯片微沟道 采用光刻、湿法刻蚀等微加工技术方法对 ITO导电玻璃进行加工, 并制备出 ITO阵列电极.最后经修饰、封装等工 序得到基于 ITO玻璃-PDMS复合式低电压电泳芯片.实验表明:采用该方法制备的 ITO阵列电极线条清晰, 沟道 侧壁陡直、表面光滑.同时, 采用该方法制备芯片周期短, 不需要昂贵的制作设备. :电路板 低电压电泳芯片 速制备 ITO玻璃-PDMS :TN305 :A :1008-8423 (2009 )03-0320-04 RapidFabricationofLow-voltageElectrophoresisChipBased onITOGlassandPDMS LIAOHong-hu,aLIAOYu, YIJin-qiao, HUANGYong (SchoolofInformationEngneering, HubeiUniversityforNationalitie,sEnshi44 5000, China) Abstrac:tAnewmethodofrapidlyfabricatinglow-voltageelectrophoresischipbasedonITOglassand PDMSispresented.Thechannelmouldoflow-voltageelectrophoresischipisdesignedbyProtelsoft- war,eandacircuitboardmouldisshapedbyusingthecircuitboardprocessingtechnology.ThePDMS micro-channelsofthischipareformedbyusingthePDMSmonolithicpouringtechnology.TheITOe- lectrodearrayisfabricatedbyusingthelithography, wettingetching, andotherprocessingtechnology. Finally, thelow-voltageelectrophoresischipbasedonITOglassandPDMSiscompositedbythepro- cessingcours,esuchasmodified, packagingprocesse,sandotherprocessingtechnology.Theexpermient resultsshowthatlow-voltageelectrophoresischiphasthehighperformanc,e suchastheclearlines shapeofITOelectrod,e thesteepchannelwal,landthesmoothsurface.Thefabricationperiodofchipis shor,tandnoexpensiveequipmentisneededtofabricatethemicrochip. Keywords:circuitboardlow-voltageelectrophoresischiprapidfabricationIndiumTinOxidesglass (ITO)andPolydmiethylsiloxane(PDMS) , , , , , , [ 1