基于RF MEMS 开关的移相器设计 - Core.PDF

41 上 海 交 通 大 学 学 报 Vol. 41 Sup. 2007 4 JOURNAL OF SHANGH AI JIAOT ONG UNIVERSITY Apr. 2007 : 1006-2467( 2007) S-0032-04 RF MEMS a a, b 陈华君 , 郭东辉 ( a. ; b. , 36100 ) : 传统电子移相器由于损耗问题难以向更高 率发展, 射 微机电系统( RF MEMS) 技术的 出现使其得以替代半导体开关来设计更高 率的移相器. 利用具有优异RF 性能的串联电阻式RF MEM S 开关来进行开关线式移相器设计, 通过开关切换不同的信号延迟通路, 以实现从0~ 180 步进22. 的相移功能.仿真结果表明, 该移相器在 . 8 GHz 时, 插入损耗在- 0. 3~ - 0. 7 dB 变 化, 输入回损低于- 20 dB, 相移功能正确. : 移相器; 开关线式移相器; 相控阵天线; 射 微机电系统 : TN 432 : A Switch- Line Phase Shifter wit h RF- MEMS Sw itch a a, b CH E N H ua-j un , G UO D ong-h ui ( a. EDA Lab. , Dept. of Physics; b. Dept. of Electronic Eng . , Xiamen U niv. , Xiamen 36100 , China) Abstract: Due to the losses of semiconductor sw itch, traditional electronic phase shifter could hardly per- form desirably at higher frequency . RF MEMS technology demonstrates that it could be used in phase shifter design as a substitute for traditional semiconductor sw itch. Since series resistor RF MEM S sw itch has excellent RF performance, it is used in the design of sw itch-line phase shifter. This phase shifter a- chieves phase shift from 0to 180steps 22. by using RF MEM S sw itch to sw itch betw een different de- lay-time lines. The simulation results demonstrate that the insertion loss is from - 0. 3 dB to - 0. 7 dB, and the return loss is low er than - 20 dB. The function of phase shift is correct. Key words: phase shifter; sw itch-line phase shifter; phase array antenna; radio frequency micro electro mechanical system ( RF MEM S) p--i n MESFET s pHEMT , , . , .