激光泰曼干涉的研究与应用 - Read.DOC

目 录 摘 要 I Abstract II 1　绪论 １ 2　激光泰曼干涉仪原理和特点 １ 2.1总体结构和特点 １ 2.2 光学系统的各种干涉条纹及成像原理 ３ 2.2.1等倾干涉原理 ３ 2.2.2 等厚干涉原理 ３ 2.2.3 泰曼干涉原理 ４ 2.2.4 泰曼干涉条纹的特性 ５ 3　泰曼干涉的应用研究 ６ 3.1 泰曼干涉仪的综合精度计算 ６ 3.2用泰曼干涉仪检测室内微小振动和空气流动 ６ 3.3用泰曼干涉仪检测系统内温度变化 ７ 3.4 用泰曼干涉仪来检验直角棱镜的综合质量 ８ 3.4.1 泰曼干涉中直角棱镜干涉条纹的理论分析 ８ 3.3.2 泰曼干涉系统下的直角棱镜干涉条纹与分析 １３ 4 结论与展望 １８ 4.1 结论 １８ 4.2 展望 １８ 5 鸣 谢 ２１ 6 参考文献 ２１ 7 附录 ２３ 摘 要 本文深入讨论了激光束干涉产生的原理，研究了激光泰曼干涉仪的工作机理和泰曼干涉仪产生的等厚干涉条纹，并利用HA-3型便携式光学实验部件组成激光泰曼干涉系统；从理论上分析了直角棱镜在泰曼干涉系统中各种误差对产生的干涉条纹的影响，并利用分析得到的结果对2个直角棱镜实际上的干涉条纹进行对比和讨论；介绍了泰曼干涉仪的多种应用，并探讨了用安装好电视摄像机和微机的泰曼-电视-微机系统进行振幅测量的原理和方法；从理论上分析了用泰曼干涉系统测算直角棱镜的角度误差的公式，并得出干涉系统理论上能测算出无限小的直角误差。最后结果表明：在测算直角棱镜的直角误差上，泰曼干涉系统较其它器件有极大的优越性。但在精确地测量棱镜的表面误差时，有一定局限性。这个泰曼干涉系统能快速评定透镜的表面质量和角度误差，有一定的实用性。 关键词：泰曼干涉；直角棱镜；干涉检验 Abstract The principle of laser interference is described deeply and the principle of Twyman-laser interferometer is analyzed and find out the stripes made from Twyman interferomtric system are equal thickness stripes.A Twyman interferometric system is made up from HA-3 portable lab of optics.Different errors of right angle prism are calculated to find out different influence of these errors to interferometric stripes. The error principle is used to analyze the quality of two right angle prisms and angle errors.Serval application of Twyman interferometer are introduced and have a look in the application of Twyman-TV-computer system and find out the means of measuring amplitude by Twyman-TV-computer system.Serval means improved precision of Twyman interferometric system are researched theoretically.The result shows Twyman interferometric systems have great advantages over other devices in measuring right angle errors.But it has a certain limitations on measuring surface error precisely.This Twyman interferometric system can assess the quality of surface and the right angle error rapidly,so it has a little of practicability. Key words: Twyman interferometer ; Right angle prism ; Interferometric test  激光泰曼干涉的研究与应用 1　绪论