超精密车床的软件误差补偿技术研究.pdf

10 1 北京工业职业技术学院学报 1V ol. 10 20 11 1 Jan. 2011 JOURNAL OF BE IJING POLYTECH N IC COLLEGE 1 2 高 慧 杜建军 ( 1. , 100042; 2. , 518055) : 以多体系统运动学误差分析理论为基础, 根据超精密金刚石车床 N ano form 200 的T 型结构 局和 误差分 情况, 推导出了包含各项几何误差的超精密车床相对运动约束方程; 求解此方程就可以得到补偿几 何误差后修正的数控代码值在此基础上, 开发了针对光学器件加工的超精密车床的误差补偿软件通过 实际切削实验表明, 该补偿技术能使光学器件的超精密车削加工的轮廓精度提高 50% : 误差补偿; 超精密加工; 光学器件; 多体系统 : TH 161 : A : 1671- 6558( 2011) 0 1- 18- 04 Software E rror Com p ensation of U ltra P recision M ach in e T ool 1 2 Gao H u i Du Jian un ( 1. Be i ing Po lytechn ic Co llege, Bei ing 100042, Ch ina; 2. Shenzhen Graduate Schoo,l H arbin Institute of T echno logy, Shenzhen Guangdong 518055, China) Abs tract: Based on the theory of k inem atics fo r mu lt i- body system, the re lative m otion constra int equation is de duced according to the structure layout and the error d istribut ion of the ultra prec ision turning m ach ine too l N ano fo rm 200. By solv ing the constraint equation, the corrected NC code is derived and can com pensate the geom etric errors. T he error com pensation software is developed ami ed at the u ltra prec ision m anufactur ing o f opt ics parts. T he cutting expermi ents show that the m ethod and m odel in this paper can mi prove the accuracy about 50% for the ultra prec ision turning o f optics parts. K ey w ord s: error com pensat ion; ultra- precision m anufacturing; optics parts; m ulti- body system 0 , , , N ano fo rm 200 ,