磨削阶段大口径非球面拼接测量技术pdf (7373Kb).PDF

51 4 Vol.51 No. 4 2015 2 JOURNAL OF MECHANICAL ENGINEERING Feb. 2015 DOI 10.3901/JME.2015.04.022 * ( 361005) Taylor Hobson 176 mm 3 0.25 μm–0.22 μm-2.77 μm TG161 Stitching Measurement Technique for Large-aperture Aspheric Surface during Grinding Process ZHANG Dongxu YANG Ping BI Guo YANG Xu YE Shiwei GUO Yinbiao (Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361005) Abstract In order to test large-aperture aspheric surface optice element accurately during grinding process, a comprehensive optimization data processing model of stitching measurement is proposed based on coordinate measuring. Firstly, the stitching model for two segments of surface shape contour is built based on multi-body system theory and least square principle; secondly, the rejecting redundant data model is built based on curvature principle and least square fitting of aspheric equation; then the comprehensive optimization processing model for multiple segments stitching is built; three generatrices of a non-axisymmetry aspherical optical element whose aperture is 176 mm is stitching measured by Taylor Hobson profilometer and the data is processed by the model mentioned in the text. The results show that the maximum average error of the stitching measurement is 0.25 μm, and the minimum average error of the stitching measurement is –0.22 μm which is compared with the single measurement. The error is an order of magnitude higher than the surface shape peak–valley value 2.77 μm of