坩埚预处理技术在氮化铝晶体生长工艺中的应用-深圳大学.PDF

35 6 人 工 晶 体 学 报 V o.l 35 N o. 6 2006 12 JOURNA L OF SYNTHET IC CRY STAL S D ecember 2006 武红磊, 郑瑞生, 孙秀明, 罗 飞, 杨 帆, 刘 文, 敬守勇 ( 5 18060) : 0. 8mm 1. 5mm 36mm 5mm : ; ; : O 782 : A : 1000-985X ( 2006) 06- 1359-04 Application of Pretreated Crucible Technology to the Growth ofA lN Crystals WUH ong-lei, ZHENG R ui-sheng, SUN X iu-m ing, L UO F ei, YAN G Fan, LIU Wen, JING Shou-yong ( Inst itute of O ptoelectron ics Sh enzhen U n ivers ity Shen zh en 5 18060 Ch ina) Received 10M ay 2006) Abstract: T he lifetmi e of the cru cib le is one of the m a in diff icult ies in the grow th process o f A lN crysta ls. A graphite ring w ith the sam e in ternal and external diam eters as the cruc ib les w as inserted betw een the tungsten cru cible and its lid. A fter a high- tem perature pretreatm ent in n itrogen am b ient for the cru cible and graphite ring sub assem bly a tungsten carb ide protecting film w as form ed on the contact ing area o f the cru c ible and its lid. T his pretreatm ent process can avo id effectively the bond ing o f the cru c ible and its lid and increase g reat ly the cru cib le lifetmi e. By using the pretreated tungsten cru cib le A lN single crysta ls of 0. 8mm d iam eter and 1. 5mm long and po lycrysta lline A lN bou les o f 36mm d iam eter and 5mm long w ere grow n by physical vapor tran sport techno logy. K ey words: alum inum n itride crysta;l physical vapor tran sport; cru cible 1 引 言 ( G aN ) / 21 G aN G aN : 2006-05-10 : ( N o. N o. ); ( N o. 040 11297) ;