A Compact X-ray Generator Using a （一个紧凑的x射线发生器使用）.pdf

PowerMEMS 2013 IOP Publishing Journal of Physics: Conference Series 476 (2013) 012016 doi:10.1088/1742-6596/476/1/012016 A Compact X-ray Generator Using a Nanostructured Field Emission Cathode and a Microstructured Transmission Anode S Cheng, F A Hill, E V Heubel, and L F Velásquez-García Microsystems Technology Laboratories, Massachusetts Institute of Technology 77 Massachusetts Ave., Cambridge, Massachusetts 02139, USA shcheng@mit.edu Abstract. We report the design, fabrication, and preliminary characterization of a compact X- ray generator for improved X-ray absorption imaging that uses a nanostructured field emission cathode (FEC) as the electron source and a microstructured transmission anode as the X-ray generating element. FECs consume less power, respond faster, and tolerate lower vacuum than thermionic cathodes used in conventional X-ray generators. The use of a transmission anode, instead of a conventional reflection anode, allows filtering of the background radiation (bremsstrahlung) while allowing efficient generation of X-rays at lower voltages by exciting atomic shell transitions, resulting in emission of X-rays with narrow spectral linewidth for sharper imaging of biological tissue. The fabricated FEC contains arrays of self-aligned, gated field emitters that turn on at bias voltages under 30 V and transmit 99.5% of the electrons to the anode. The FEC emits a maximum current of 1.2 µA per field emitter (588 µA tota