半导体厂洁净室之节能措施（Energy saving measures for clean room of semiconductor plant）.docVIP

下载本文档

4
0
约 18页
2017-08-04 发布于河南
举报
版权申诉

半导体厂洁净室之节能措施（Energy saving measures for clean room of semiconductor plant）.doc

1、原创力文档（book118）网站文档一经付费（服务费），不意味着购买了该文档的版权，仅供个人/单位学习、研究之用，不得用于商业用途，未经授权，严禁复制、发行、汇编、翻译或者网络传播等，侵权必究。。
2、本站所有内容均由合作方或网友上传，本站不对文档的完整性、权威性及其观点立场正确性做任何保证或承诺！文档内容仅供研究参考，付费前请自行鉴别。如您付费，意味着您自己接受本站规则且自行承担风险，本站不退款、不进行额外附加服务；查看《如何避免下载的几个坑》。如果您已付费下载过本站文档，您可以点击这里二次下载。
3、如文档侵犯商业秘密、侵犯著作权、侵犯人身权等，请点击“版权申诉”（推荐），也可以打举报电话：400-050-0827(电话支持时间：9:00-18:30)。
4、该文档为VIP文档，如果想要下载，成为VIP会员后，下载免费。
5、成为VIP后，下载本文档将扣除1次下载权益。下载后，不支持退款、换文档。如有疑问请联系我们。
6、成为VIP后，您将拥有八大权益，权益包括：VIP文档下载权益、阅读免打扰、文档格式转换、高级专利检索、专属身份标志、高级客服、多端互通、版权登记。
7、VIP文档为合作方或网友上传，每下载1次，网站将根据用户上传文档的质量评分、类型等，对文档贡献者给予高额补贴、流量扶持。如果你也想贡献VIP文档。上传文档

半导体厂洁净室之节能措施（Energy saving measures for clean room of semiconductor plant） Energy saving measures for clean room of semiconductor plant First, the # C0 Ot0 N5 O5 w shall Current situation of energy consumption in clean room of domestic semiconductor plant Participation, energy saving technology, E/, |4,}) W7, X9, h%, Y, X Conclusion) X7, N2, j%, R8, E, `0, E, R References B / D1 o+ _!! \7 g# L Study on refrigeration and air conditioning - Taipei science and Technology University, Hu Shizheng, Cai Binghuang - Xiao Fuwen Clean room air conditioning system energy consumption for 5~10 times, in the domestic shortage of energy and energy consumption are facing increasingly serious situation, how to improve the air conditioning system energy saving technology in clean room, in order to enhance productivity and competitiveness, we must face the issue. - C8, D, f#, K (N1, F, V, I) In recent years, the rapid development of high tech industry, the wafer manufacturing or photoelectric technology from micron, sub micron level to nanometer, these industries process operating environment, not in the clean room, the product is not up to the requirements of precision scale. At present, the convergence of the semiconductor industry is increasing, the wafer diameter is large, and the clean room energy consumption is 5~10 times of the general air-conditioning system, so the energy consumption is becoming more and more serious. In order to maintain the earths ecological environment and sustainable development, we should make good use of human energy and resources, efforts to improve the energy saving technology of clean room air conditioning system, in order to increase productivity, competitiveness and by reducing energy usage. The present situation of energy consumption in clean rooms of domestic semiconductor plants and energy saving technologies are discussed. [References 1~6] B (Y8, G8, X, \8, V) General electronic power plant total installed capacity of about tens of thousands of