Complementary MetalOxideSemiconductor （互补金属氧化物半导体）.pdf

Japanese Journal of Applied Physics 51 (2012) 02BL01 REGULAR PAPER DOI: 10.1143/JJAP.51.02BL01 Complementary Metal–Oxide–Semiconductor Image Sensor with Microchamber Array for Fluorescent Bead Counting 1 1 1;3 1;3 1;3 Kiyotaka Sasagawa , Keisuke Ando , Takuma Kobayashi , Toshihiko Noda , Takashi Tokuda , Soo Hyeon Kim2;3 , Ryota Iino2;3 , Hiroyuki Noji2;3 , and Jun Ohta1;3 1 Graduate School of Materials Science, Nara Institute of Science and Technology, Ikoma, Nara 630-0192, Japan 2 Department of Applied Chemistry, The University of Tokyo, Bunkyo, Tokyo 113-8656, Japan 3 JST-CREST, Kawaguchi, Saitama 331-0012, Japan Received September 26, 2011; accepted November 11, 2011; published online February 20, 2012 We fabricated a complementary metal–oxide–semiconductor image sensor with a femtoliter microchamber array. The microchamber array plate is used for trapping microbeads and limiting the incident angle of light detected by the sensor. The sensor has an interference filter for fluorescent microbeads imaging. We detected fluorescent and nonfluorescent microbead with this sensor and showed its capability for counting the number of fluorescent chambers. # 2012 The Japan Society of Applied Physics 1. Introduction Excitation light Single molecule enzymatic assay is a highly efficient Fluorescent bead method for measuring ultra-low concentrations of proteins in complex samples.1–3) This method has been applied Micro-chamber for bead-based