退火对Al掺杂ZnO薄膜结构和磁性的影响-河北师范大学学报.PDF

35 / 2 / 河北师范大学学报/ / Vol. 35 No. 2 2011 3 JOURNALOFHEBEI NORMAL UNIVERSITY/ Natural Science Edition/ Ma r. 2011 退火对Al 掺杂ZnO 薄膜结构和磁性的影响 1, 2, 3 1, 2, 3 1, 2 1, 2 1, 2 1, 2 岂云开 , 顾建军 , 刘力虎 , 徐 芹 , 蔡 宁 , 孙会元 ( 1. , 050016; 2. , 050016; 3. , 067000) : Al ZnO , . X ( XRD) ( PPMS) . . , , , , . Al ZnO Al ZnO . : ZnO ; ; ; : O 482. 54 : A : 20 11) 020 15005 Annealing Effects on Structural and Magnetic Properties of Aldoped ZnO Thin Films 1, 2, 3 1, 2, 3 1, 2 1, 2 1, 2 1, 2 QI Yunk i , GU Ji njun , LIU Lihu , XU Qin , CAI Ning , SU N Huiyu n ( 1. College of Physics Science n d Inform tion Engineering, Hebei Norm l University, Hebei Shiji zhu ng 050016, Chin ; 2. Key L bor tory of Adv nced Films, Hebei Province,Hebei Shiji zhu ng 050016, Chin ; 3.Dep rtment of Physics,Hebei Norm l University for N tion lities, Hebei Chengde 067000, Chin ) Abstract:Al doped ZnO films h ve been prep red by dc m gnetron sputtering. These films w ere nne led in different tmosphere nd temper ture. The cryst l structures w ere n lyzed by Xr y diffr ction ( XRD) , nd the m gnetic properties were me sured by physic l properties me surement system ( PPM S) with the m gnetic field p r lleled to the films pl ne. An improved m gnetic corrected method w s pplied on the me surement d t . T he results show the microstructure nd m gnetic properties re influenced by nne ling tmosphere. Comp red w ith the films nne led in v cuum , the films nne led in ir show obvious room temper ture ferrom gnetism, the m gnetic moment incre ses bout n order of m gnitude. The r