利用扫描隧道显微镜构造硅表面nm尺度图形的研究.pdfVIP

See discussions, stats, and author profiles for this publication at: /publication/293261333 Nano-scale pattern of silicon surface by scanning tunneling microscope Article · Januar 1998 CITATIONS READS 0 7 3 authors, including: Jingping Zhu Xian Jiaotong Universit 49 PUBLICATIONS 71 CITATIONS SEE PROFILE Some of the authors of this publication are also working on these related projects: polarization imaging View project All content following this page was uploaded b Jingping Zhu on 23 Februar 2016. The user has requested enhancement of the downloaded file. 第32 卷　第11期 　　　西　安　交　通　大　学　学　报 　Vol.32　№11 　1998 年11月 　　　JOURNAL OF XI′AN JIAOTONG UNIVERSITY　　　　　Nov.1998 nm 赵玉清　朱京平　徐　蛟 ( ,710049, ) 　在大气中,利用扫描隧道显微 (STM)在氢钝化的Si(110)表面直接进行化学改性, 形成了 20～60 n 的SiO 线条.通过化学腐蚀,成功地将该n 线条转移到Si基片上.实验证明, 经STM 改性的SiO 可以作为腐蚀掩膜,利用此氧化膜可以在Si表面构造n 尺度图形结构,从而为研究构 造具有量子效应的微器件工艺奠定了基础. 　电子束曝光　扫描隧道显微 　n 技术　n 尺度表面改性　微细加工 　TN305.7 Nano-Scale Pattern of Silicon Surface by Scanning Tunneling Microscope Z hao Y uqing 　Z hu J ingp ing 　X u J iao (Xi′an Jiaotong University, 710049, Xi′an) Abstract 　Che ical odification of a H-passivated Si(110)surface hasbeen adeby scanning tunnel- ing icroscope (STM)operated in air.Oxide nanowires are fabricated.Using che ical etching, the patterns are transfered to the silicon substrate.It is shown experi entally that the oxide fil of Si can be used to akeetching ask.Nanoscale patterns werefabricated on Si surface by application of quan- tu effect devices. Keywords　electron