原创力文档基于分形理论的mems光开关微镜分析与模拟 analysis and simulation for micro-mirror of mems optical switch based on fractal theory.pdfVIP
- 2
- 0
- 约1.09万字
- 约 3页
- 2017-08-13 发布于上海
- 举报
基于分形理论的mems光开关微镜分析与模拟 analysis and simulation for micro-mirror of mems optical switch based on fractal theory
SEMICONDUCTOR OPTOELECTRONICS Vol. 27 No. 6 Dec. 2006
光电器件
基于分形理论的MEMS 光开关微镜分析与模拟
张 毅，罗 元，徐晓东
（重庆邮电大学 自动化学院，重庆400065 ）
摘 要： 微镜是微电子机械系统（MEMS ）光开关的关键结构，镜表面粗糙度对微镜反射率、
插入损耗等特性影响重大。给出了用扫描隧道显微镜测量的一组微镜的表面形貌，进而将分形理
论应用在微镜表面的分析上，同时一种三维的Weierstrass-Mandeibrot （W-M ）函数被用以模拟各种
不同的表面形貌。结果对比表明，这种W-M 函数可用于微镜表面的建模和形貌分析。
关键词： MEMS 微镜；分形；Weierstrass-Mandeibrot 函数
中图分类号：TN256 文献标识码：A
您可能关注的文档
- 基于发电-负荷需求系统评估方法的智能微网风险评估 risk evaluation of smart microgrid based on the assessment method of generation-load demand system.pdf
- 基于发射分集的多点中继合作通信系统性能研究 study on transmit diversity-based cooperative communication system with multi-points relays.pdf
- 基于发电重新调度的小干扰稳定问题研究 research of small signal stability based on generation rescheduling method.pdf
- 基于翻译的信息隐藏分析检测 analysis and detection of translation-based steganography.pdf
- 基于反步法的单管正激变换器控制 control of forward converter by back-stepping design approach.pdf
- 基于发射信号预处理的包络移动补偿方法 compensation method for envelop migration based on transmit signal pre-process.pdf
- 基于反步法的电流型pwm整流器控制策略 control strategy of current-source pwm rectifier based on back-stepping design approach.pdf
- 基于反步控制的pmsm转速跟踪研究 research on speed tracking of pmsm based on backstepping control.pdf
- 基于反常霍尔效应的薄膜磁滞回线测量系统的原理与设计 principle and design of film hysteresis loop measurement system based on abnormal hall effect.pdf
- 基于繁殖粒子群算法的火电厂负荷优化分配 optimal load dispatching based on breeding particle swarm optimization algorithm for thermoelectric power plant.pdf
- 基于分形理论的电介质放电仿真计算 fractal simulation of breakdown in dielectric.pdf
- 基于分形理论的超特高压线路绕击耐雷性能评估 estimation on lightning shielding performance of the transmission lines based on the fractal theory.pdf
- 基于分形理论的电力系统负荷特性研究 research characteristic of power load based on fractal theory.pdf
- 基于分形技术与神经网络的数字水印算法 image digital watermarking algorithm based on fractal and neural networks.pdf
- 基于分形理论的电力系统负荷特性研究 research on characteristic of power load based on fractal theory.pdf
- 基于分形理论的混凝土大坝结冰变径模型设想 hypothetical model of the diameter changes of ice on concrete dam based on fractal theory.pdf
- 基于分形理论的载波信号提取 extraction of carrier signal based on fractal theory.pdf
- 基于分形理论的水中流注放电仿真 fractal simulation of streamer discharge in liquid water.pdf
- 基于分形维和局部切空间均值重构的非线性降噪方法 nonlinear noise reduction method based on fractal dimension and the local tangent space mean reconstruction.pdf
- 基于分形维数的电机轴承故障诊断 application of rough set in transformer fault diagnosis.pdf
文档评论（0）