TCAD工具_devise编程.pptVIP

ISE TCAD Training —— devise编程 编程设计流程 定义器件尺寸 计算坐标 创建器件结构 掺杂：定义掺杂、定义掺杂窗口、放置掺杂 网格：定义网格、定义网格窗口、放置网格 保存文件 器件基本结构 变量定义 ; - space (define Lg 2.0) ; [um]Gate length (define Lgs 0.8) ; [um] (define Lgd 1.0) (define Ls 1.2) ; source contact length (define Ld 1.0) ; drain contact length ; - layers thickness (define HSubs 0.075 ) ; (define HNucl 1.0 ) (define HBuff 3.0 ) (define HBarr 0.023 ) ; - region names (define regBarr regBarr) (define regBuff regBuff) (define regNucl regNucl) (define regSubs regSubs) 计算坐标 ; Derived X (define Xg (/ Lg 2.0 )) (define Xg_ (* Xg -1.0 )) (define Xd (+ Xg Lgd )) (define Xmax (+ Xd Ld )) (define Xs (* (+ Xg Lgs) -1)) ;Xs is negative (define Xmax_ (- Xs Ls )) ; Derived Y (define Y0 0.002) (define YBarr (+ Y0 HBarr)) (define YBuff (+ YBarr HBuff)) (define YNucl (+ YBuff HNucl)) (define YSubs (+ YNucl HSubs)) 创建矩形结构 (isegeo:create-rectangle 　 　　(position -3 1.0 0.0 ) 　　(position 3 3.0 0.0) 　　“GaN” 　“regBuff” ) 还可以创建任意多边形，弧形等 参见培训资料或手册 定义列表 (define MATERIALS (list matBarr matBuff matNucl matSubs )) (define HEIGHTS (list HBarr HBuff HNucl HSubs )) (define REGIONS (list regBarr regBuff regNucl regSubs )) 创建器件结构 ; Overlap resolution: New replaces Old (isegeo:set-default-boolean ABA) ; Create device basic structure (define Y 0.002) (for-each (lambda (REGION MATERIAL HEIGHT) ; local variables (begin ; Body of the loop (isegeo:create-rectangle (position Xmax_ Y 0.0) (position Xmax (+ Y HEIGHT) 0.0) MATERIAL REGION ) (set! Y (+ Y HEIGHT)) ) ) REGIONS MATERIALS HEIGHTS ; Lists ) 添加顶点 定义接触 ;define contacts Contact declarations (isegeo:define-contact-set drain 4.0 (color:rgb 0.0 1.0 0.0 ) ## ) (isegeo:define-contact-set source 4.0 (color:rgb 1.0 0.0 0.0 ) ## ) (isegeo:define