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mems高精度电容读出电路的单芯片集成研究 study on mems precision capacitive readout circuits design
第30卷第4期 电子器件 V01．30No．4
2007年8月 ChineseJournal0fElectronDevices Aug．2007
onMEMSPrecision ReadoutCircuits
Study CapacitiVe Design”
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of MEMSsensors a for
Abstract：Therapiddevelopmentcapacitive posesbi
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