基于tcad的90 nm sti应力仿真与研究 90 nm sti stress simulation and research based on tcad.pdfVIP

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基于tcad的90 nm sti应力仿真与研究 90 nm sti stress simulation and research based on tcad.pdf

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基于tcad的90 nm sti应力仿真与研究 90 nm sti stress simulation and research based on tcad

第33卷第6期电子器件 V01．33No．6 Chinese ofElectronDevices 2010年12月 Journal Dec．2010 90amSTI SimulationandResearchBased011TCAD+ Stress LIU Jun Bingtao，SUN Lingling‘，LIU Circuitand Dianzi 310018，China) (研LabofnF System，MinistryofEducation，HangzhouUniversity，Hangzhou

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