基于圆环形薄壁截面梁的温度自补偿拉力传感器 a pull sensor with temperature self-compensated based on loop thin-wall section beam.pdfVIP
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基于圆环形薄壁截面梁的温度自补偿拉力传感器 a pull sensor with temperature self-compensated based on loop thin-wall section beam
光 电子 ·激 光
第 卷 第 期 年 月
17 9 Z006 9 Vol. 17 No. 9 Se . Z006
Journal o O toelectronics Laser p
f p
!光电子器件和系统 !
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基于圆环形薄壁截面梁的温度自补偿拉力传感
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