collective micro-optics technologies for vcsel photonic integration集体vcsel光子集成微光学技术.pdfVIP

Hindawi Publishing Corporation Advances in Optical Technologies Volume 2011, Article ID 609643, 11 pages doi:10.1155/2011/609643 Review Article Collective Micro-Optics Technologies for VCSEL Photonic Integration V. Bardinal,1, 2 T. Camps,1, 2 B. Reig,1, 2 D. Barat,1, 2 E. Daran,1, 2 and J. B. Doucet1, 2 1 LAAS, CNRS, 7 Avenue du Colonel Roche, F-31077 Toulouse, France 2 Universite de Toulouse, UPS, INSA, INP, ISAE, LAAS, F-31077 Toulouse, France ´ Correspondence should be addressed to V. Bardinal, bardinal@laas.fr Received 1 June 2011; Accepted 13 September 2011 Academic Editor: Rainer Michalzik Copyright © 2011 V. Bardinal et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. We describe the main recent technological approaches that associate micro-optical elements to VCSELs in order to control their output beam and to improve their photonic integration. These approaches imply either a hybrid assembly or a direct integration technique. They are compared with regards to their tolerance to alignment errors and to their ease of implementation onto arrays of devices at a wafer level. In particular, we detail the integration techniques we have developed for self-aligned polymer microlens fabrication for beam collimation and short distance beam focusing. Finally, designs to achieve active micro-optics or to exploit novel nanophotonic effects are discussed. 1. Introduction surface. In Section 4, we describe recent advances in the field of active micro-optics for VCSEL