design of microcantilever-based biosensor with digital feedback control circuitmicrocantilever-based生物传感器与数字反馈控制电路的设计.pdfVIP

Hindawi Publishing Corporation Journal of Sensors Volume 2012, Article ID 586429, 9 pages doi:10.1155/2012/586429 Research Article Design of Microcantilever-Based Biosensor with Digital Feedback Control Circuit Jayu P. Kalambe and Rajendra M. Patrikar Department of Electronics Engineering, Visvesvaraya National Institute of Technology, Nagpur-440010, Maharashtra, India Correspondence should be addressed to Jayu P. Kalambe, jayu kalambe@rediff Received 29 December 2011; Revised 30 March 2012; Accepted 2 June 2012 Academic Editor: Francesco Baldini Copyright © 2012 J. P. Kalambe and R. M. Patrikar. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. This paper present the design of cantilever-based biosensors with new readout, which hold promises as fast and cheap “point of care” device as well as interesting research tools. The fabrication process and related issues of the cantilever based bio-sensor are discussed. Coventorware simulation is carried out to analyze the device behavior. A fully integrated control circuit has been designed to solve manufacturing challenge which will take care of positioning of the cantilever instead of creating nanometer gap between the electrodes. The control circuit will solve the manufacturing challenge faced by the readout methods where it is essential to maintain precise gap between the electrodes. The circuit can take care of variation obtained due to fabrication process and maintain the precise gap between the electrodes by electrostatic actuation. The control circuit consist of analog and digital modules. The reliability issues of the sensor are also discussed.