悬空纳米间隔电极对的制备并应用于单分子电学性质测量-core.pdfVIP

78 / 008 10 Fabrication of Suspended Electrodes Pair with Nanometer-sized Gap on Chip for Measuring Electrical Properties of Single Molecules 1 1 1 , , , , ( 1 , 361005; , 361005) 1 1 1 YAN G Yang , TIAN Jing- hua , LUO Zhong-zi , WU Sun-tao , TIAN Zhong-qun ( 1 State Key Laboratory of Physical Chemistry of Solid Surfaces, Department of Chemistry , College of Chemistry and Chemical Engineering, Xiamen 361005, Fujian, China; Pen-T ung Sah M icro- Electro-M echanical Systems Research Center, Xiamen U niversity, Xiamen 361005, Fujian, China) : , ( MCBJ) , ( PI) , , MCBJ / / , ( BDT) , BDF I- V : ; ; ; ; : O646 : A : 1001-4381( 008) 10-0 78-05 Abstract: For studying molecular devices, w e fabricated electrodes pair w ith a nanometer-sized gap on chip by combining photolithography and electrochemical technique. Using the thermal oxidation SiO layer and polyimide ( PI) layer as sacrifice layer materials respectively, w e made the electrodes pair suspends from the substrate w hich is available for the mechanically controllable break junction ( MCBJ) method. On the basis of this progress, the success rate in the MCBJ experiment has been im- proved and the available life of microchip used in the MCBJ experiment has also been prolonged. With combination of self-assembling ( SAM) and MCBJ methods, few molecules of benzene- 1, 4-dithiol ( BDT) w ere connected to the two ends of the electrodes pair to form the metal-molecule- metal junc-