copper-metalized gaas phemt with cuge ohmic contactscopper-metalized砷化镓与cuge phemt欧姆接触.pdfVIP

Hindawi Publishing Corporation International Journal of Microwave Science and Technology Volume 2012, Article ID 418264, 5 pages doi:10.1155/2012/418264 Research Article Copper-Metalized GaAs pHEMT with Cu/Ge Ohmic Contacts E. V. Anichenko,1 V. S. Arykov,1 E. V. Erofeev,1 and V. A. Kagadei2 1 Microelectronics Department, Research and Production Company “Micran”, 47 Vershinina Street, Tomsk 634045, Russia 2 RF Electronics Department, Submicron Technologies, 8 Akademicheskiy Avenue, Tomsk 634021, Russia Correspondence should be addressed to E