l波段薄膜体声波谐振器纵波谐振频率计算 longitudinal wave resonant frequency calculation of l-band film bulk acoustic resonator.pdfVIP
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l波段薄膜体声波谐振器纵波谐振频率计算 longitudinal wave resonant frequency calculation of l-band film bulk acoustic resonator
第 卷第 期 压 电 与 声 光
3 6 3 Vol.3 6 No.3
年 月
20 1 4 0 6 PIEZOELECTRICS & ACOUSTOOPTICS June 20 1 4
文章编号: ( )
1 0042474 20 1 4 0303 3 104
L 波段薄膜体声波谐振器纵波谐振频率计算
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1 2 2 3 1 3 1
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