- 1、本文档共24页,可阅读全部内容。
- 2、原创力文档(book118)网站文档一经付费(服务费),不意味着购买了该文档的版权,仅供个人/单位学习、研究之用,不得用于商业用途,未经授权,严禁复制、发行、汇编、翻译或者网络传播等,侵权必究。
- 3、本站所有内容均由合作方或网友上传,本站不对文档的完整性、权威性及其观点立场正确性做任何保证或承诺!文档内容仅供研究参考,付费前请自行鉴别。如您付费,意味着您自己接受本站规则且自行承担风险,本站不退款、不进行额外附加服务;查看《如何避免下载的几个坑》。如果您已付费下载过本站文档,您可以点击 这里二次下载。
- 4、如文档侵犯商业秘密、侵犯著作权、侵犯人身权等,请点击“版权申诉”(推荐),也可以打举报电话:400-050-0827(电话支持时间:9:00-18:30)。
查看更多
SEMATECH Design Guidelines for Gas Box (SEMATECH气盒的设计指导方针)
SEMATECH Design Guidelines for
Gas Box Components
SEMATECH
Technology Transfer-ENG
SEMATECH and the SEMATECH logo are registered service marks of SEMATECH, Inc.
Product names used in this publication are for identification purposes only and may be trademarks of their respective companies.
© 1996 SEMATECH, Inc.
SEMATECH Design Guidelines for Gas Box Components
Technology Transfer #-ENG
SEMATECH
June 28, 1996
Abstract: This document is designed as a manufacturer’s guideline for standardizing components for gas
boxes, which represent a substantial part of the cost of process tools used in semiconductor
manufacturing. The document provides specifications for electrical and mechanical characteristics
for the most common components of a typical gas box: valves, mass flow controllers (MFCs) and
mass flow meters (MFMs), regulators, filters and purifiers, and pressure transducers. The
information in this guide is intended to benefit SEMATECH member companies in working with
suppliers toward meeting the goal of reducing fluid and gas systems cost of ownership (COO) by
20% in future fabrication facilities. The guidelines are represented in drawings and tables. This
document is in development as an industry standard by Semiconductor Equipment and Ma
您可能关注的文档
- Section 3.7 Optimization Problems Florida (3.7节佛罗里达优化问题).pdf
- Section 4 Knauf Insulation UK(英国第四节可耐福保温).pdf
- Section 4 Flanges AAP Industries(第四节法兰AAP产业).pdf
- Section 4 Manual Transaxles Testroete(第四节体力的驱动桥Testroete).pdf
- Section 4 – Power Transformer Design TI(第四部分u2014u2014电力变压器设计).pdf
- Section 4. Power Design CORE SELECTION (第四节。).pdf
- SECTION 400 WATER SUPPLY FACILITIES Elbert (埃尔伯特SECTION 400供水设施).pdf
- SECTION 5 Alternative Windows(第五节选择窗口).pdf
- SECTION 5 STORM DRAINS AustinTexas.gov(第五节雨水渠AustinTexas.gov中).pdf
- Section 5 Well Drilling Methods(第五节钻井方法).pdf
文档评论(0)