Semiconductor Equipment Assessment（半导体设备评估）.pdf

Semiconductor Equipment Assessment An enabler for production ready 450 mm equipment Outline • Introduction • History of SEA - Semiconductor Equipment Assessment • Semiconductor Equipment Assessment • Assessment Activities - Examples • 450 mm Equipment Assessment • Summary Outlook Introduction SEA programs proven principle: • Take novel, innovative and promising equipment, that has left the RD phase, into a joint assessment activity • Collaboration of equipment supplier, end-user and research institute to perform assessment experiments for one specific equipment and finally develop the equipment according to the end-user’s specifications • Bridge the well-known gap between the phase of having an engineered tool available and finding the “first user” for it Outline • Introduction • History of SEA - Semiconductor Equipment Assessment • Semiconductor Equipment Assessment • Assessment Activities - Examples • 450 mm Equipment Assessment • Summary Outlook Semiconductor Equipment Assessment S E 1997 A P r o j e c t s