THE EFFECT OF CORRUGATIONS ON （干硬后的效果）.pdf

IJE TRANSACTIONS B: Applications Vol. 26, No. 11, (November 2013) 1323-1330 International Journal of Engineering J o u r n a l H o m e p a g e : w w w . i j e . i r The Effect of Corrugations on Mechanical Sensitivity of Diaphragm for MEM S Capacitive Microphone M. Taybi, B. A. Ganji* Electrical Computer Engineering Department, Babol University of Technology, Bab ol, Ira n P A P E R I N F O A B S T R A C T Paper history: In this paper the effect of corrugations on mechanical sensitivity of diaphragm for MEMS capacitive Received 11 June 2012 microphone is investigated. Analytical analyses have been carried out to derive mathematic expression D Recivede in revised form 12 February 2013 for mechanical sensitivity and displacement of corrugated diaphragm with residual stress. It is shown Accepted 28 February 2013 that the mechanical sensitivity and displacement of diaphragm can be modeled using thin plate theory. I The mechanical stress of corrugated diaphragm is calculated using mathematical model and its Keywords: relationship with residual stress is expressed. The analytical results show that the mechanical Corrugated Diaphragm sensitivity of diaphragm can be increased using corrugations, because of reducing the effect of residual S Residual Stress