全息透镜分光法五自由度测试系统-天津大学期刊中心.PDF

1998 3　　 　　　　　 31　 2　 Mar. 1998　　 　　　　　 JOURNAL OF TIANJIN UNIVERSITY　　　　　　 Vol. 31　 No. 2　 孙长库 　周富强　王　仲　叶声华 () 　　基于激光全息技术、激光准直技术、激光漂移补偿技术和磁光调制技术的综合运用 ,研制 了以单 一激光束为基准, 同 测定目标五 个自由度偏差的测试系统.该测试系统用于机床变形、风 洞应变天平体轴加载自动校测等多 个自由度的准直和微小偏移量的测量. 　,,, 　 741. 14 T H FIVE DEGREE-OF-FREEDOM MEASURING SYSTEM USING HOLOGRAPHICLENS LIGHT SPLITTING Sun Changku　Zhou Fuqiang　 Wang Zhong　 Ye Shenghua ( School of Precision Instruments and Opto-electronics En ineerin , Tianjin University) A stract　 This paper presents a m easurin sy stem which can measure five de ree-of-freedom er- . rors of an object simultaneously It is constructed on th e basis of a sin le laser beam and th e com- , , bined application of technolo ies of laser holo raphy laser ali nment laser drift compensation and ma neto-optic modulation. It can be used in the multiple de ree-of-freedom ali nm ent and mea- surement of fine deviation, such as the automatic testin of the deformation of machine tools, and the loadin of the axon in a strain wind tunnel balance. Keywords　five de ree-of-freedom errors, holo raphic lens, ma neto-optic modulatin , drift com- pensation 　　,,, ,, [1, 2 ] .,, ,. 　　,, ,. 、. 1996 3 29. 1996 12 11. 　* 　 1967, ,,. 1967, , , . Born in m ale Dr associate prof 　 31 2　　　　　　: ·221· 1　 　　,. , 0、± 1 3. 1 3: 2、 3 4. 1, O. 1　 Fig. 1　Sketch diagram of the measurement system 1. 1　 x、 y 、 θ θ X Y 　　T、U、V,(T ≈ ≈90°, ≈0) ,,