silvaco的学习心得（SILVACOs learning experience）.docVIP

silvaco的学习心得（SILVACOs learning experience） The simulation of 1.Silvaco components were started in DeckBuild, including the visualization tool Tonyplot output. The main components include the following three: The ATHENA process (deposition, ion implantation, diffusion, oxidation, lithography, mask) to control the generator structure The simulation of ALTAS device characteristics Preparation of DevEdit device structure and Mesh editor The simulation process of 2.ATHENA A. based simulation grid The command is line, x, y, location parameters, spacing. X, y X and Y respectively set the vertical axis of the grid line, location (LOC) on the axis of the coordinate, spacing spacing between grid lines (unit UM) B. simulation initialization The command is initialize (init) C. process (such as deposition, photolithography, etching, oxidation, diffusion...) D. extraction characteristics (such as the junction depth, the thickness of the material, the concentration distribution of...) The command is extract The structure of E. operation (the introduction on the structure, structure, rotating mirror and preservation of structure...) The command is structure Save the file structure outfile=filename.str Do structure mirror left on the mirror structure On the flip, the substrate surface of the structure flip.y Import structure infile=filename.str file structure F.Tonyplot display 3. file types The input file *.in (DeckBuild interface simulation input file) The structure of the file *.str (device file) The device simulation results file *.log (simulation results or log files) The display settings file *.set (Tonyplot file) *.lay (mask mask file structure information file) Filename.dat (the document) 4.Silvaco command format 1. by command and paramter parameter1=n n as command numerical table Command parameter2=c C string The 2. line can not finish at the end of the line continued, # notes 5.DeckBuild command: Extract, Go, Set and tonyplot 1.extract Grammar (Syntax): extract name=param